HYDROGEN-SULFIDE SENSOR-BASED ON TIN OXIDE DEPOSITED BY SPRAY-PYROLYSIS AND MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION

被引：86

作者：

MANORAMA, S ^{[1
]}

DEVI, GS ^{[1
]}

RAO, VJ ^{[1
]}

机构：

[1] INDIAN INST CHEM TECHNOL,DIV PHYS & INORGAN CHEM,MAT SCI GRP,HYDERABAD 500007,INDIA

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 23期

关键词：

D O I：

10.1063/1.111326

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spray pyrolysis and microwave plasma chemical vapor deposition techniques have been employed successfully for the deposition of CuO impregnated SnO2 films suitable for sensing hydrogen sulfide and methyl mercaptan. The observed change in conductivity of these films upon exposure to H2S gas in air has been explained on the basis of the band theory of solids.

引用

页码：3163 / 3165

页数：3

共 13 条

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