EVALUATION AND MEASUREMENT OF CHANGES IN INTENSITY OF THE CHARACTERISTIC LINES AND BACKGROUND OF AUGER-ELECTRON SPECTRA DUE TO CRYSTALLINE EFFECTS - APPLICATION TO AN ALUMINUM TARGET BOMBARDED WITH ELECTRONS

被引:18
作者
AKAMATSU, B
HENOC, P
MAURICE, F
LEGRESSUS, C
RAOUADI, K
SEKINE, T
SAKAI, T
机构
[1] CENS,CEA,F-91191 GIF SUR YVETTE,FRANCE
[2] CTR NATL ETUD TELECOMMUN,F-92220 BAGNEUX,FRANCE
[3] UNIV TUNIS,TUNIS,TUNISIA
[4] JEOL LTD,TOKYO,JAPAN
关键词
D O I
10.1002/sia.740150103
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We evaluated and measured the influence of channelling on changes in intensity of the characteristic lines and background of Auger electron spectra by performing calculations and experiments on an aluminium single crystal. Propagation of the incident beam in the crystal was calculated by the dynamic theory of electron diffraction, while the Monte‐Carlo method was used to simulate electron paths in the material as a function of experimental conditions. We measured the contrasts of the Al LVV (68 eV) and Al KLL (1396 eV) lines in both channelling and abnormal absorption positions and we recorded the background of the En(E) curves for different electron accelerating voltages and for some strong reflections. The theoretical and experimental results are consistent, revealing the magnitude of crystalline effects in AES. These effects, although they are a hindrance in routine analysis, can be used to study changes in the surface layer composition of metals and ceramics. Copyright © 1990 John Wiley & Sons Ltd.
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页码:7 / 14
页数:8
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