SURFACE TEXTURING BY SPUTTER ETCHING

被引:50
作者
BERG, RS [1 ]
KOMINIAK, GJ [1 ]
机构
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词
D O I
10.1116/1.568930
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:403 / 405
页数:3
相关论文
共 19 条
  • [1] ARNDT RA, 1975, 11TH PHOT SPEC C PHO
  • [2] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION
    BARBER, DJ
    FRANK, FC
    MOSS, M
    STEEDS, JW
    TSONG, IST
    [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) : 1030 - 1040
  • [3] Carter G., 1968, ION BOMBARDMENT SOLI
  • [4] CUOMO JJ, 1975, APPL PHYS LETT, V26, P557, DOI 10.1063/1.87990
  • [5] ION-BEAM ETCHING
    GLOERSEN, PG
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 28 - 35
  • [6] Hermanne N., 1970, Radiation Effects, V5, P203, DOI 10.1080/00337577008235022
  • [7] Kaminsky M., 1965, ATOMIC IONIC IMPACT, DOI 10.1007/978-3-642-46025-8
  • [8] KOMINIAK GJ, 1975, SAND750455 SAND LAB
  • [9] LAZNOVSKY W, 1975, RES DEV, V26, P47
  • [10] MATTOX DM, 1975, SAND750361 SAND LAB