EVALUATION OF NEW OZONE GENERATOR DESIGNED FOR OXIDE FILM FORMATION BY MOLECULAR-BEAM EPITAXY METHOD

The quality of ozone vapor produced with a new ozone generator was evaluated. The ozone vapor was produced by evaporation of liquid ozone after accumulating it in a ozone vessel at various temperatures between 75 and 95 K. Mass analysis of the ozone vapor revealed that the purity of ozone in the vapor depended on both the ozone vessel temperature during liquefaction and that during evaporation. The purity was approximately 70% when liquid ozone accumulation temperatures higher than 90 K were used. The activity of the ozone vapor was investigated by oxidation of a Cu foil under low pressure condition. The formation of a CuO layer by exposure to the ozone vapor (pressure: approximately 5 x 10(-4) Pa) at 300-degrees-C was confirmed through x-ray photoelectron spectroscopy analysis.