DIELECTRIC-PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILM FABRICATED ON IN2O3 - SN SUBSTRATE BY SOL-GEL METHOD

被引：16

作者：

OHYA, Y

TANAKA, T

TAKAHASHI, Y

机构：

[1] Department of Applied Chemistry, Gifu University, Yanagido Gifu

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

PZT THIN FILM; ITO ELECTRODE; SOL-GEL METHOD; ETHANOLAMINE METHOD; DIELECTRIC PROPERTIES;

D O I：

10.1143/JJAP.32.4163

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead zirconate titanate (PZT) films with the composition of Pb(ZrxTi1-x)O3 (x: 0. 2-0.8 were fabricated by dip-coating methods. The sol was prepared using ethanolamine as a sol stabilizer. The substrate was In2O3:Sn (ITO) sputtered glass (Corning #7059). PZT was well crystallized by heating at 600-degrees-C. After heating, the interface between PZT and ITO was investigated in structural, chemical, and electrical respects. These tests revealed that there is no reaction layer or diffusion layer between the interface. The dielectric constant and loss factor of the films were measured against temperature. From the D-E hysteresis curves, the films were confirmed to be ferroelectric with P(r) = 5 muC/cm2 and E(c) = 85 kV/cm.

引用

页码：4163 / 4167

页数：5

共 17 条

[1]

Bell A, 1984, FERROELECTRICS, V54, P147

[2]

IKAWA H, 1992, SERAMIKKUSU, V27, P701

[3] SIZE EFFECT ON THE FERROELECTRIC PHASE-TRANSITION IN PBTIO3 ULTRAFINE PARTICLES [J].