SPUTTERING BY A SUM OF IMPULSES - THE EFFECT OF FINITE TRACK WIDTH

被引:10
作者
FENYO, D [1 ]
机构
[1] UNIV UPPSALA,DEPT RADIAT SCI,DIV ION PHYS,S-75121 UPPSALA,SWEDEN
来源
PHYSICAL REVIEW B | 1993年 / 47卷 / 13期
关键词
D O I
10.1103/PhysRevB.47.8263
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A continuum mechanical model of the effect of the pressure pulse produced by a sudden deposition of energy inside a cylindrical track in a solid (e.g., by an energetic ion) is extended to cases with finite track width.
引用
收藏
页码:8263 / 8264
页数:2
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