CRUCIAL ROLE OF RESIDUAL GASES IN AMORPHIZATION OF CRYSTALLINE FILMS

被引：17

作者：

HAUSER, JJ

机构：

来源：

PHYSICAL REVIEW B | 1985年 / 32卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.32.2887

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：2887 / 2890

页数：4

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