THIN-FILM MICROSYSTEM APPLICABLE IN (BIO)CHEMICAL SENSORS

被引：34

作者：

TVAROZEK, V

TIEN, HT

NOVOTNY, I

HIANIK, T

DLUGOPOLSKY, J

ZIEGLER, W

LEITMANNOVAOTTOVA, A

JAKABOVIC, J

REHACEK, V

UHLAR, M

机构：

[1] COMENIUS UNIV BRATISLAVA, DEPT BIOPHYS & CHEM PHYS, CS-80100 BRATISLAVA, SLOVAKIA

[2] MICHIGAN STATE UNIV, DEPT PHYSIOL, E LANSING, MI 48824 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 19卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(93)01096-M

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A strip thin-film microsystem based on the silicon diaphragm or glass substrate, thin-film heater and planar interdigital array of electrodes has been developed. The used thin-film and silicon micromachining technologies are compatible with microelectronics IC technologies which allow a further development towards smart sensors. Description of some possible applications of thin-film microsystem is presented: (i) ps-resistance sensor; (ii) electrochemical voltammetric sensor, and (iii) biosensor based on the supported bilayer lipid membranes. The last one is presented in more details because the lipid bilayers seem to be the attractive candidates for biosensors applications.

引用

页码：597 / 602

页数：6

共 13 条

[1] CHEMICAL SENSING, MOLECULAR ELECTRONICS AND NANOTECHNOLOGY - INTERFACE TECHNOLOGIES DOWN TO THE MOLECULAR SCALE [J].