SIMULATION AND VISUALIZATION OF SCANNING PROBE MICROSCOPE IMAGING

被引:11
作者
PINGALI, GS
JAIN, R
KONG, LC
机构
[1] UNIV CALIF SAN DIEGO,DEPT ELECT & COMP ENGN,LA JOLLA,CA 92093
[2] UNIV MICHIGAN,DEPT PHYS,ANN ARBOR,MI 48109
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 03期
关键词
D O I
10.1116/1.587737
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article presents a model for the interaction of probe and sample geometries in scanning probe microscope (SPM) imaging. The model is in terms of mathematical morphological operations and serves as a powerful tool for simulating SPM images given the geometric shapes of the scanning probe and the scanned sample. The artifacts produced due to probe geometry can clearly be seen in such simulated images. The model also serves as a basis for a tool through which SPM users can visualize how different probe shapes image a sample of interest. Based on the visualization, users can, for example, choose the most suitable probe shape for scanning a sample. We present several simulated SPM images produced using the model. The model is verified by comparing predicted images of spheres and cylindrical patterns with actual scanning force microscope images of polystyrene spheres and microfabricated cylindrical structures.
引用
收藏
页码:2184 / 2188
页数:5
相关论文
共 10 条
[1]   AN ALGORITHM FOR SURFACE RECONSTRUCTION IN SCANNING TUNNELING MICROSCOPY [J].
CHICON, R ;
ORTUNO, M ;
ABELLAN, J .
SURFACE SCIENCE, 1987, 181 (1-2) :107-111
[2]  
GALLARDA H, 1991, UNPUB 5 P C INT CIRC
[3]  
GIARDINA C, 1988, MORPHOLOGICAL METHOD
[4]   CHARACTERIZATION OF SCANNING PROBE MICROSCOPE TIPS FOR LINEWIDTH MEASUREMENT [J].
GRIFFITH, JE ;
GRIGG, DA ;
VASILE, MJ ;
RUSSELL, PE ;
FITZGERALD, EA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3586-3589
[5]   RECONSTRUCTION OF STM AND AFM IMAGES DISTORTED BY FINITE-SIZE TIPS [J].
KELLER, D .
SURFACE SCIENCE, 1991, 253 (1-3) :353-364
[6]   SHARP, VERTICAL-WALLED TIPS FOR SFM IMAGING OF STEEP OR SOFT SAMPLES [J].
KELLER, D ;
DEPUTY, D ;
ALDUINO, A ;
LUO, K .
ULTRAMICROSCOPY, 1992, 42 :1481-1489
[7]   INTEGRATED ELECTROSTATICALLY RESONANT SCAN TIP FOR AN ATOMIC-FORCE MICROSCOPE [J].
KONG, LC ;
ORR, BG ;
WISE, KD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (03) :634-641
[8]  
PINGALI GS, 1992, UNPUB NOV P IEEE WOR, P282
[9]  
PINGALI GS, 1992, UNPUB DEC P MVA 92 I, P639