MICROWAVE ION-SOURCE

被引：113

作者：

SAKUDO, N ^{[1
]}

TOKIGUCHI, K ^{[1
]}

KOIKE, H ^{[1
]}

KANOMATA, I ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1977年 / 48卷 / 07期

关键词：

D O I：

10.1063/1.1135144

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：762 / 766

页数：5

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