THEORY, DESIGN AND OPERATION OF A SURFACE-ACOUSTIC-WAVE HYDROGEN-SULFIDE MICROSENSOR

被引：22

作者：

GALIPEAU, JD

FALCONER, RS

VETELINO, JF

CARON, JJ

WITTMAN, EL

SCHWEYER, MG

ANDLE, JC

机构：

[1] UNIV MAINE,DEPT ELECTR & COMP ENGN,ORONO,ME 04469

[2] ANDERSEN LABS INC,BLOOMFIELD,CT 06002

[3] SENSOR RES & DEV CORP,ORONO,ME 04473

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 24卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

HYDROGEN SULFIDE MICROSENSOR; SURFACE ACOUSTIC WAVES;

D O I：

10.1016/0925-4005(94)01313-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The theory, design and operation of a surface acoustic wave (SAW) hydrogen sulfide (H2S) sensor that uses a gold-doped semiconducting metal oxide, tungsten trioxide (WO3:Au), film as the gas sensing element is described. It is shown experimentally that the dominant property change that occurs in the film when exposed to H2S is the electrical conductivity. Finally, it is pointed out that upon exposure to a target gas, a properly designed SAW gas sensor that monitors large changes in film electrical conductivity is much more sensitive than a similar sensor that monitors mechanical properties such as mass loading.

引用

页码：49 / 53

页数：5

共 12 条

[1]

Auld B., 1973, ACOUSTIC FIELDS WAVE, V2

[2]

Bryant A., 1981, 1981 P IEEE ULTR S, P171

[3] SAW SENSORS [J].