A SIMPLE METHOD FOR THE DETERMINATION OF FILM THICKNESS FROM ELECTRON IMAGE-CONTRAST IN A SCANNING ELECTRON-MICROSCOPE

被引:14
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RAJORA, OS
CURZON, AE
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10.1016/0040-6090(85)90163-4
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T [工业技术];
学科分类号
08 ;
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页码:235 / 238
页数:4
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