FABRICATION OF AU NANOPARTICLES BY RADIOFREQUENCY MAGNETRON SPUTTERING

We have investigated the evolution of the size and the morphology of Au nanoparticles fabricated by rf magnetron sputtering techniques at room temperature as a function of sputtering gas pressure, p; rf, input power, L; and sputtering rime, t. For 60 less than or equal to p less than or equal to 300 mTorr, Au nanoparticles were deposited. For 60 less than or equal to p less than or equal to 250 mTorr, the particle size increased with increasing Land extending t. On increasing L and t further, film formation occurred. When p = 300 mTorr, nanoparticles formed at L = 200 W.