STRUCTURE, FORMATION MECHANISMS AND KINETICS OF REACTION-BONDED SILICON-NITRIDE

被引:79
作者
JENNINGS, HM [1 ]
RICHMAN, MH [1 ]
机构
[1] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912
关键词
D O I
10.1007/BF02403359
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2087 / 2098
页数:12
相关论文
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