FORMATION OF AS-GROWN YBACUO THIN-FILMS BY RF MAGNETRON SPUTTERING FROM 3 TARGETS

被引:8
作者
KURODA, K
KOJIMA, K
TANIOKU, M
YOKOYAMA, K
HAMANAKA, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期
关键词
D O I
10.1143/JJAP.28.1797
中图分类号
O59 [应用物理学];
学科分类号
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页码:1797 / 1801
页数:5
相关论文
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