COMPOSITE - A COMPLETE MODELING PROGRAM OF SILICON TECHNOLOGY

被引:19
作者
LORENZ, J
PELKA, J
RYSSEL, H
SACHS, A
SEIDL, A
SVOBODA, M
机构
[1] FRAUNHOFER INST MIKROSTRUKTURTECH,BERLIN,FED REP GER
[2] FRAUNHOFER INST FESTKORPERTECHNOL,MUNICH,FED REP GER
[3] UNIV ERLANGEN NURNBERG,LEHRSTUHL ELEKTR BAUELEMENTE,D-8520 ERLANGEN,FED REP GER
[4] UNIV MUNICH,INST NUMER MATH,DEPT MATH,D-8000 MUNICH 2,FED REP GER
关键词
D O I
10.1109/TCAD.1985.1270140
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:421 / 430
页数:10
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