SURFACE MODIFICATIONS OF POLYMERS WITH FLUORINE-CONTAINING PLASMAS - DEPOSITION VERSUS REPLACEMENT REACTIONS

被引：42

作者：

LOH, IH

KLAUSNER, M

BADDOUR, RF

COHEN, RE

机构：

[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139

[2] MIT,DEPT CHEM ENGN,CAMBRIDGE,MA 02139

来源：

POLYMER ENGINEERING AND SCIENCE | 1987年 / 27卷 / 11期

关键词：

D O I：

10.1002/pen.760271115

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：861 / 868

页数：8

共 23 条

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