共 20 条
[3]
BURGGRAF P, 1988, SEMICOND INT, V11, P55
[4]
DEEP ULTRAVIOLET PATTERNING OF MONOLAYER FILMS FOR HIGH-RESOLUTION LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (06)
:3447-3450
[5]
CALVERT JM, 1992, MATER RES SOC SYMP P, V260, P905, DOI 10.1557/PROC-260-905
[6]
CALVERT JM, 1991, SOLID STATE TECHNOL, V34, P77
[7]
CALVERT JM, 1993, ACS SYM SER, V537, P210
[8]
CALVERT JM, IN PRESS ORGANIC THI, V1
[9]
CALVERT JM, 1993, 1924 P SOC PHOT INST, P30