TRANSFERABILITY OF RELATIVE SENSITIVITY FACTORS IN SECONDARY ION MASS-SPECTROMETRY - AN EVALUATION OF THE POTENTIAL FOR SEMIQUANTITATIVE ULTRATRACE ANALYSIS OF METALS

被引:9
作者
FRIEDBACHER, G [1 ]
VIRAG, A [1 ]
GRASSERBAUER, M [1 ]
机构
[1] TECH UNIV VIENNA,INST ANALYT CHEM,PHYS ANAL LAB,GETREIDEMARKT 9,A-1060 VIENNA,AUSTRIA
关键词
D O I
10.1021/ac00214a015
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Secondary Ion mass spectrometry (SIMS) has turned out to be a powerful tool for multielemental ultratrace characterization of metals. In many cases, a limiting factor for the evaluation of quantitative results is the availability of reference materials. For that reason, it would be desirable to perform quantitative or at least semiquantitative analysis by means of a transfer of relative sensitivity factors (RSFs) from one matrix to another and to calculate RSFs through Interpolation using an experimental regression function. The results shown in this paper suggest that a transfer of RSFs for semiquantitative multielemental ultratrace analysis with SIMS referring to the matrices W, Mo, Ta, Nb, WTI10%, TaSl2, and SI is possible whenever an error factor of 2 can be accepted. © 1990, American Chemical Society. All rights reserved.
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页码:1615 / 1619
页数:5
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