OPTICAL-PROPERTIES OF ZNO FILMS DEPOSITED BY R-F SPUTTERING ON SAPPHIRE SUBSTRATES

被引:13
作者
VALENTINI, A
QUIRINI, A
VASANELLI, L
机构
[1] CTR INFORMAT STUDI MAT,UNIT GRP NAZL STRUTTURA MAT,I-70126 BARI,ITALY
[2] IST NAZL FIS NUCL,I-70126 BARI,ITALY
[3] UNIV LECCE,DIPARTIMENTO SCI MAT,I-73100 LECCE,ITALY
[4] CTR INFORMAT STUDI MAT,UNIT GRP NAZL STRUTTURA MAT,I-73100 LECCE,ITALY
关键词
D O I
10.1016/0040-6090(89)90104-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:L167 / L171
页数:5
相关论文
共 9 条
[1]  
AMBERG I, 1986, J APPL PHYS, V60, pR123
[2]  
BOND WL, 1965, J APPL PHYS, V36
[3]   OPTICAL-PROPERTIES OF NONSTOICHIOMETRIC ZINC-OXIDE FILMS DEPOSITED BY BIAS SPUTTERING [J].
BRETT, MJ ;
PARSONS, RR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :423-427
[4]  
HEAVENS OS, 1964, PHYSICS THIN FILMS
[5]   ZINC-OXIDE FILMS FOR ACOUSTOELECTRIC DEVICE APPLICATIONS [J].
HICKERNELL, FS .
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (05) :621-629
[6]   STRUCTURE-RELATED OPTICAL-PROPERTIES OF THIN-FILMS [J].
MACLEOD, HA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :418-422
[7]   HIGHLY TRANSPARENT AND CONDUCTING INDIUM-DOPED ZINC-OXIDE FILMS BY SPRAY PYROLYSIS [J].
MAJOR, S ;
BANERJEE, A ;
CHOPRA, KL .
THIN SOLID FILMS, 1983, 108 (03) :333-340
[8]  
Valeev A., 1963, OPT SPEKTROSK, V15, P269
[9]  
VINCETT PS, 1975, NATURE, V225, P542