PREPARATION OF LA-MODIFIED LEAD TITANATE THIN-FILMS BY RF-MAGNETRON SPUTTERING METHOD AND THEIR PYROELECTRIC PROPERTIES

被引：7

作者：

KAMADA, T ^{[1
]}

KOMAKI, K ^{[1
]}

HAYASHI, S ^{[1
]}

KITAGAWA, M ^{[1
]}

TAKAYAMA, R ^{[1
]}

DEGUCHI, T ^{[1
]}

HIRAO, T ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,AIR CONDITIONING RES LAB,KUSATSU,SHIGA 525,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 2B期

关键词：

PYROELECTRIC; PLT; THIN FILM; RF-MAGNETRON SPUTTERING; INTERMITTENT DEPOSITION;

D O I：

10.1143/JJAP.34.L233

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High-quality La-modified lead titanate (PLT) films were grown on MgO substrates by an rf-magnetron sputtering method. In this method, intermittent deposition was realized by periodical repetition of deposition and non-deposition processes with rotation of the substrate holder. The difference between intermittent and continuous methods was examined in terms of the crystal structure and the pyroelectric properties of the films. Intermittent deposition was found to enhance the horizontal grain growth of the films. Excellent PLT films with a high pyroelectric coefficient of 5.0 x 10(-8) C/cm(2) . K and low dielectric constant of 185 were reproducibly obtained by this method.

引用

页码：L233 / L235

页数：3

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