FABRICATION OF AN ELECTRON MULTIPLIER UTILIZING DIAMOND FILMS

被引:27
作者
MEARINI, GT
KRAINSKY, IL
WANG, YX
DAYTON, JA
RAMESHAM, R
ROSE, MF
机构
[1] CASE WESTERN RESERVE UNIV,CLEVELAND,OH 44106
[2] AUBURN UNIV,AUBURN,AL 36849
基金
美国国家航空航天局;
关键词
CHEMICAL VAPOR DEPOSITION; DIAMOND; ELECTRONIC DEVICES; SECONDARY ELECTRON EMISSION;
D O I
10.1016/0040-6090(94)90311-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High secondary electron yields (sigma = 14-27) from polycrystalline diamond films on Mo substrates have been reported previously. We observed that continuous exposure to an electron beam degraded the secondary yield in vacuum as a function of fluence owing to a loss of surface hydrogen. However, the hydrogen partial pressure could be adjusted such that the high secondary yield remained stable during beam exposure. We have constructed a prototype electron multiplier using these diamond films for use in ultrahigh vacuum. A gain of 0.9 x 10(5) has been measured in a d.c. mode. Palladium, titanium and aluminum nitride have been studied for possible dynode substrate materials which might eliminate the need for hydrogen during operation. Total secondary yields as high as 50 were measured from diamond on palladium and sigma was stable at 25 during heating at 700 K in vacuum. Raman spectroscopy and scanning electron microscopy showed that variations in sigma from diamond films on Pd were due to differing concentrations of non-diamond carbon.
引用
收藏
页码:151 / 156
页数:6
相关论文
共 8 条
  • [1] Bekker T. L., 1992, International Electron Devices Meeting 1992. Technical Digest (Cat. No.92CH3211-0), P949, DOI 10.1109/IEDM.1992.307513
  • [2] BRONSHTEIN IM, 1969, SECONDARY ELECTRON E, P273
  • [3] FOX CA, 1993, 3RD P INT S DIAM MAT, P64
  • [4] GILMOUR AS, 1986, MICROWAVE TUBES, P134
  • [5] QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER
    HIMPSEL, FJ
    KNAPP, JA
    VANVECHTEN, JA
    EASTMAN, DE
    [J]. PHYSICAL REVIEW B, 1979, 20 (02): : 624 - 627
  • [6] INVESTIGATION OF DIAMOND FILMS FOR ELECTRONIC DEVICES
    MEARINI, GT
    KRAINSKY, IL
    DAYTON, JA
    [J]. SURFACE AND INTERFACE ANALYSIS, 1994, 21 (02) : 138 - 143
  • [7] PHOTOEMISSION AND PHOTON-STIMULATED ION DESORPTION STUDIES OF DIAMOND(111) - HYDROGEN
    PATE, BB
    HECHT, MH
    BINNS, C
    LINDAU, I
    SPICER, WE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 364 - 367
  • [8] DIRECT VERIFICATION OF HYDROGEN TERMINATION OF THE SEMICONDUCTING DIAMOND(111) SURFACE
    WACLAWSKI, BJ
    PIERCE, DT
    SWANSON, N
    CELOTTA, RJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 368 - 370