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ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1972, 9 (06)
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PREFERENTIAL SPUTTERING OF TIC AND TIB2 COATINGS UNDER D+ AND HE-4(+) BOMBARDMENT - PARTIAL YIELDS
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1982, 20 (04)
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