AL2O3 AS AN ANTI-REFLECTION COATING FOR INP/INGAASP LEDS

被引:10
作者
CHIN, AK
ZYDZIK, G
SINGH, S
VANUITERT, LG
MINNECI, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 01期
关键词
D O I
10.1116/1.582507
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
6
引用
收藏
页码:72 / 73
页数:2
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