APPLICATIONS OF DIAMOND-LIKE CARBON-FILMS TO ELECTRONIC COMPONENTS

被引：16

作者：

NAKAUE, H ^{[1
]}

MITANI, T ^{[1
]}

KUROKAWA, H ^{[1
]}

YONEZAWA, T ^{[1
]}

YOSHIO, H ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,DIV VIDEO MOVIE,KADOMA,OSAKA 571,JAPAN

来源：

THIN SOLID FILMS | 1992年 / 212卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90527-I

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films show remarkable characteristics such as high mechanical hardness, low friction and chemical stability. Therefore, they are very suitable as protective layers. We examined DLC films as protective layers for metal evaporated tapes, cylinders and capstans which are used in video tape recorders.

引用

页码：240 / 244

页数：5