CHARACTERIZATION STUDIES OF P-TYPE POROUS SI AND ITS PHOTOELECTROCHEMICAL ACTIVATION

被引:21
作者
KOSHIDA, N
ECHIZENYA, K
机构
[1] Department of Electronic Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei
关键词
D O I
10.1149/1.2085687
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Photoelectrochemical effects of surface modification with a porous layer have been studied experimentally in detail for p-type Si substrates. At first the in situ characterization of porous Si/electrolyte interfaces are carried out by impedance measurements in various electrolytes, as a function of the porous layer thickness. Information on the surface morphology and on the space charge layer capacitance can be separated by an appropriate adjustment of the bias voltage and frequency. An evidence of Fermi level pinning at the interface is found from an analysis of the flatband potential. Next, it is shown that deposition of Pt onto the porous Si layer (PSL) surface is useful for its photoelectrochemical activation. Effects of Pt are investigated by impedance and flatband potential measurements of the Pt-deposited PSL electrodes.
引用
收藏
页码:837 / 841
页数:5
相关论文
共 17 条
[1]   FORMATION AND PROPERTIES OF POROUS SILICON FILM [J].
ARITA, Y ;
SUNOHARA, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) :285-295
[2]   DETERMINATION OF LATTICE-PARAMETER AND ELASTIC PROPERTIES OF POROUS SILICON BY X-RAY-DIFFRACTION [J].
BARLA, K ;
HERINO, R ;
BOMCHIL, G ;
PFISTER, JC ;
FREUND, A .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (03) :727-732
[3]   X-RAY TOPOGRAPHIC CHARACTERIZATION OF POROUS SILICON LAYERS [J].
BARLA, K ;
BOMCHIL, G ;
HERINO, R ;
PFISTER, JC ;
BARUCHEL, J .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (03) :721-726
[4]   MICROSTRUCTURE AND FORMATION MECHANISM OF POROUS SILICON [J].
BEALE, MIJ ;
CHEW, NG ;
UREN, MJ ;
CULLIS, AG ;
BENJAMIN, JD .
APPLIED PHYSICS LETTERS, 1985, 46 (01) :86-88
[5]   AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE FORMATION AND MICROSTRUCTURE OF POROUS SILICON [J].
BEALE, MIJ ;
BENJAMIN, JD ;
UREN, MJ ;
CHEW, NG ;
CULLIS, AG .
JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) :622-636
[6]   PORE-SIZE DISTRIBUTION IN POROUS SILICON STUDIED BY ADSORPTION-ISOTHERMS [J].
BOMCHIL, G ;
HERINO, R ;
BARLA, K ;
PFISTER, JC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) :1611-1614
[7]  
de Levie R., 1963, ELECTROCHIM ACTA, V8, P751, DOI [DOI 10.1016/0013-4686(63)80042-0, 10.1016/0013-4686(63)80042-0]
[8]  
De Levie R., 1964, ELECTROCHIM ACTA, V9, P1231, DOI [10.1016/0013-4686(64)85015-5, DOI 10.1016/0013-4686(64)85015-5, 10.1016/0013- 4686(64)85015-5]
[9]   PHOTOELECTROCHEMICAL BEHAVIOR OF N-TYPE POROUS-SI ELECTRODES [J].
KOSHIDA, N ;
KOYAMA, H ;
KIUCHI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (07) :1069-1072
[10]   THE CURRENT-VOLTAGE CHARACTERISTICS OF A PHOTOELECTROCHEMICAL CELL USING P-TYPE POROUS SI [J].
KOSHIDA, N ;
NAGASU, M ;
SAKUSABE, T ;
KIUCHI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (02) :346-349