A TURBULENT-FLOW MODEL FOR THE RF INDUCTIVELY COUPLED PLASMA

被引：42

作者：

ELHAGE, M

MOSTAGHIMI, J

BOULOS, MI

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 11期

关键词：

D O I：

10.1063/1.343297

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4178 / 4185

页数：8

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