PLASMA-INDUCED FIXED OXIDE CHARGE

被引：7

作者：

BOS, J

HENDRIKS, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 03期

关键词：

D O I：

10.1063/1.344449

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1244 / 1251

页数：8

共 22 条

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