Enzyme solutions of glucoamylase, acid protease, alkaline protease and lipase were treated with micro-bubbles of supercritical carbon dioxide (SC CO2) fed from a cylindrical filter nozzle, The micro-bubbles of SC CO2 could increase the CO2 concentration in the sample solution from 0.4 to 0.92 mol/l at 25 MPa and 35 degrees C, and hence could improve the efficiency of inactivation by about 3 times compared to treating without the filter nozzle, Alkaline protease and lipase in the solution could be completely inactivated by the treatment at 35 degrees C and 15 MPa for 30 min. With the inactivation of glucoamylase and acid protease, their residual activity-CO2 density profiles consisted of two straight lines with intersections at density values of 0.82 and 0.60 g/cm(3), respectively. These enzymes showed an abrupt decrease in activation in regions above the CO2 density of their intersections.