FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING

被引:37
作者
TANAKA, K
HIGUMA, Y
YOKOYAMA, K
NAKAGAWA, T
HAMAKAWA, Y
机构
[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
[2] SETSUNAN UNIV,FAC ENGN,NEYAGAWA,OSAKA 572,JAPAN
关键词
D O I
10.1143/JJAP.15.1381
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1381 / 1382
页数:2
相关论文
共 3 条
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[2]   FERROELECTRIC CERAMIC ELECTROOPTIC MATERIALS AND DEVICES [J].
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PROCEEDINGS OF THE IEEE, 1969, 57 (05) :751-+
[3]   CHEMICAL PREPARATION OF PLZT POWDER FROM AQUEOUS-SOLUTION [J].
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HAMAKAWA, Y .
MATERIALS RESEARCH BULLETIN, 1976, 11 (03) :323-328