MASS DENSITY AND HYDROGEN CONCENTRATION IN DIAMOND-LIKE CARBON-FILMS - PROTON RECOIL, RUTHERFORD BACKSCATTERING AND ELLIPSOMETRIC ANALYSIS

被引：21

作者：

INGRAM, DC ^{[1
]}

WOOLLAM, JA ^{[1
]}

BUABBUD, G ^{[1
]}

机构：

[1] UNIV NEBRASKA, DEPT ELECT ENGN, LINCOLN, NE 68588 USA

来源：

THIN SOLID FILMS | 1986年 / 137卷 / 02期

基金：

美国国家科学基金会;

关键词：

ELLIPSOMETRIC ANALYSIS - PROTON RECOIL - RUTHERFORD BACKSCATTERING;

D O I：

10.1016/0040-6090(86)90023-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：225 / 230

页数：6

共 25 条

[1]

ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[2] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION [J].

ANGUS, JC ;

WILL, HA ;

STANKO, WS .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2915-&

[3]

ANGUS JC, 1982, NASA CR165588 CONTR

[4]

Azzam R.M.A., 1979, ELLIPSOMETRY POLARIZ

[5]

BANKS BA, 1982, NASA TM82873 TECH ME

[6]

BUABBUD BH, UNPUB THIN SOLID FIL

[7] KINETICS OF CARBON DEPOSITION ON DIAMOND POWDER [J].

CHAUHAN, SP ;

ANGUS, JC ;

GARDNER, NC .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) :4746-4754

[8] NONDESTRUCTIVE ANALYSIS FOR TRACE AMOUNTS OF HYDROGEN [J].

COHEN, BL ;

DEGNAN, JH ;

FINK, CL .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :19-&

[9] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[10]

ELGORESY A, 1968, SCIENCE, V161, P363

← 1 2 3 →