CLEAVED EDGE OVERGROWTH FOR QUANTUM WIRE FABRICATION

被引：68

作者：

PFEIFFER, L

STORMER, HL

BALDWIN, KW

WEST, KW

GONI, AR

PINCZUK, A

ASHOORI, RC

DIGNAM, MM

WEGSCHEIDER, W

机构：

[1] AT and T Bell Laboratories, Murray Hill

来源：

JOURNAL OF CRYSTAL GROWTH | 1993年 / 127卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(93)90746-J

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We review a new molecular beam epitaxy (MBE) technique we call cleaved edge overgrowth (CEO), which makes possible fabrication of quantum wires or other lower dimensional quantum structures with atomic precision. CEO is accomplished by performing two separate MBE overgrowths separated by an in situ cleave of the substrate sample. We review our development of this novel method and give several examples of new structures recently fabricated using it.

引用

页码：849 / 857

页数：9

共 12 条

[1]

DIGNAM MJ, IN PRESS

[2] SUPERLATTICE AND NEGATIVE DIFFERENTIAL CONDUCTIVITY IN SEMICONDUCTORS [J].