ELECTRON-DENSITY MEASUREMENTS OF ARGON SURFACE-WAVE DISCHARGES

被引：2

作者：

BRAKE, M

ROGERS, J

PETERS, M

ASMUSSEN, J

KERBER, R

机构：

[1] MICHIGAN STATE UNIV,COLL ENGN,E LANSING,MI 48824

[2] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1985年 / 5卷 / 03期

关键词：

ARGON; -; ELECTRONS; Measurements;

D O I：

10.1007/BF00615124

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The electron density of microwave-generated surface-wave discharges in argon have been measured using Stark broadening and calculated from the measured wavelengths of the standing surface wave. Results obtained from these two techniques compare well. The electron density varies from 10**1**3 to 10**1**4/cm**3 for pressures ranging from 50 to 800 torr.

引用

页码：255 / 261

页数：7

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