AUTOMATIC ELECTRON-BEAM DEPOSITION OF MULTILAYER SOFT-X-RAY COATINGS WITH LATERALLY GRADED D-SPACING

被引：11

作者：

BRUIJN, MP

CHAKRABORTY, P

VANESSEN, HW

VERHOEVEN, J

VANDERWIEL, MJ

机构：

[1] FOM, Amsterdam, Neth, FOM, Amsterdam, Neth

来源：

关键词：

D O I：

10.1117/12.7973930

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：916 / 921

页数：6

共 6 条

[1]

Barbee Jr. T.W., 1981, AIP C P, V75, P131

[2]

Bruijn M. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P182, DOI 10.1117/12.949667

[3] OPTIMIZATION OF MULTILAYER SOFT-X-RAY MIRRORS [J].

BRUIJN, MP ;

VERHOEVEN, J ;

VANDERWIEL, MJ .

[4] LONG-WAVE X-RAY-RADIATION MIRRORS [J].

GAPONOV, SV ;

GUSEV, SA ;

LUSKIN, BM ;

SALASHCHENKO, NN ;

GLUSKIN, ES .

[5] CONTROLLED FABRICATION OF MULTILAYER SOFT-X-RAY MIRRORS [J].

SPILLER, E ;

SEGMULLER, A ;

RIFE, J ;

HAELBICH, RP .

[6]

WARBURTON WK, 1984, SPRINGER SERIES OPTI, V43, P163