OPERATION OF SURFACE-CONVERSION TYPE H- SOURCE WITH CESIUM DISPENSING CONVERTERS

被引：5

作者：

BRITT, EJ ^{[1
]}

DESPLAT, JL ^{[1
]}

KORRINGA, M ^{[1
]}

LEUNG, KN ^{[1
]}

机构：

[1] RASOR ASSOC INC,SUNNYVALE,CA 94089

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573074

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1241 / 1243

页数：3

共 7 条

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