THE EFFECT OF COIL DESIGN ON MATERIALS SYNTHESIS IN AN INDUCTIVELY COUPLED PLASMA TORCH

被引：51

作者：

MCKELLIGET, JW ^{[1
]}

ELKADDAH, N ^{[1
]}

机构：

[1] UNIV ALABAMA,DEPT MET ENGN,TUSCALOOSA,AL 35401

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 06期

关键词：

D O I：

10.1063/1.341555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2948 / 2954

页数：7

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