MODULATED MOLECULAR-BEAM STUDIES OF THE SURFACE-CHEMISTRY OF SILICON REACTION WITH REACTIVE GASES

被引：43

作者：

OLANDER, DR

BALOOCH, M

ABREFAH, J

SIEKHAUS, WJ

机构：

[1] UNIV CALIF BERKELEY,DEPT NUCL ENGN,BERKELEY,CA 94720

[2] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,DEPT MAT & CHEM,LIVERMORE,CA 94550

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.583625

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1404 / 1409

页数：6

共 18 条

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