IMPROVEMENT OF RI AUGER-ELECTRON THICKNESS GAUGE FOR MEASUREMENT OF THIN METAL-FILMS

被引:5
作者
ISHIGURE, N [1 ]
MORI, C [1 ]
WATANABE, T [1 ]
机构
[1] NAGOYA UNIV,FAC ENGN,DEPT NUCL ENGN,NAGOYA,JAPAN
来源
NUCLEAR INSTRUMENTS & METHODS | 1976年 / 135卷 / 03期
关键词
D O I
10.1016/0029-554X(76)90060-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:473 / 476
页数:4
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[2]   NEW METHOD OF THIN-FILM THICKNESS MEASUREMENT USING RADIOISOTOPE AUGER ELECTRONS [J].
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NUCLEAR INSTRUMENTS & METHODS, 1974, 121 (02) :253-258
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SUGIYAMA H, 1974, B ELECTROTECH LAB JA, V38, P352