A STEP-AND-REPEAT X-RAY-EXPOSURE SYSTEM FOR 0.5-MU-PATTERN REPLICATION

被引：14

作者：

HAYASAKA, T

ISHIHARA, S

KINOSHITA, H

TAKEUCHI, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.582942

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1581 / 1586

页数：6

共 9 条

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