DEVELOPMENT OF TIN-SI3N4 NANO COMPOSITE COATINGS FOR WEAR-RESISTANCE APPLICATIONS

被引：3

作者：

DIAS, AG ^{[1
]}

VANBREDA, JH ^{[1
]}

MORETTO, P ^{[1
]}

ORDELMAN, J ^{[1
]}

机构：

[1] NETHERLANDS ENERGY RES FDN, DIV ENERGY ENGN, 1755 ZG PETTEN, NETHERLANDS

来源：

JOURNAL DE PHYSIQUE IV | 1995年 / 5卷 / C5期

关键词：

D O I：

10.1051/jphyscol:1995599

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The engineering of conventional TiN coatings to attain hardness of the order of ultrahard coatings (e.g. c-BN) by a controlled incorporation of silicon atoms in the titanium nitride lattice leading to the formation of a TiN-Si3N4 composite material is discussed. An a-priori thermodynamic approach complemented by thermochemical equilibrium calculations was used to evaluate convenient precursors and processing parameters for the production of this novel coating material. The multiphase nature of preliminary test samples deposited by PACVD is confirmed by X-ray diffraction, IR spectroscopy and EPMA analysis. The films are made up of TiN nanocrystallites embedded in an amorphous Si3N4 tissue with small amounts of free Si, as predicted by previous Ti-Si-N phase diagram calculations.

引用

页码：831 / 840

页数：10