STUDIES OF OPTIMUM CONDITIONS FOR GROWTH OF RF-SPUTTERED ZNO FILMS

被引：81

作者：

KHURIYAKUB, BT ^{[1
]}

KINO, GS ^{[1
]}

GALLE, P ^{[1
]}

机构：

[1] STANFORD UNIV,MICROWAVE LAB,STANFORD,CA 94305

来源：

关键词：

D O I：

10.1063/1.322054

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3266 / 3272

页数：7

共 14 条

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[3] WIDE-BANDWIDTH HIGH-COUPLING SPUTTERED ZNO TRANSDUCERS ON SAPPHIRE
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[4] STRUCTURE AND PROPERTIES OF RF SPUTTERED ZNO TRANSDUCERS
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[6] GRUDKOWSKI TG, COMMUNICATION
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[10] CHARACTERISTICS OF MICROWAVE ACOUSTIC TRANSDUCERS FOR VOLUME WAVE EXCITATION
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