DIFFUSION OF A SI ATOM ON THE SI(001)-2X1 SURFACE - A MONTE-CARLO STUDY

被引:23
作者
TOH, CP
ONG, CK
机构
[1] Department of Physics, National University of Singapore, 0511, Singapore
来源
PHYSICAL REVIEW B | 1992年 / 45卷 / 19期
关键词
D O I
10.1103/PhysRevB.45.11120
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We use a modified form of the Stillinger-Weber potential to obtain the adsorption sites of a silicon atom on the fully relaxed Si(001)-2 X 1 surface. The barriers between sites are also found and these are used to estimate the rates of hopping from site to site. We conclude that the direction of easy diffusion is parallel and to the side of the dimer rows. The effective activation energy for the resultant quasi-one-dimensional motion (approximately 0.33 eV) is compared with recent experimental estimates. Our results also explain the appearance of regular island growth at high temperature as well as low-temperature "diluted-dimer" growth.
引用
收藏
页码:11120 / 11125
页数:6
相关论文
共 18 条
[1]   BINDING AND DIFFUSION OF A SI ADATOM ON THE SI(100) SURFACE [J].
BROCKS, G ;
KELLY, PJ ;
CAR, R .
PHYSICAL REVIEW LETTERS, 1991, 66 (13) :1729-1732
[2]   UNIFIED APPROACH FOR MOLECULAR-DYNAMICS AND DENSITY-FUNCTIONAL THEORY [J].
CAR, R ;
PARRINELLO, M .
PHYSICAL REVIEW LETTERS, 1985, 55 (22) :2471-2474
[3]  
Flynn C. P, 1972, POINT DEFECTS DIFFUS
[4]  
MO Y, UNPUB
[5]   GROWTH AND EQUILIBRIUM STRUCTURES IN THE EPITAXY OF SI ON SI(001) [J].
MO, YW ;
SWARTZENTRUBER, BS ;
KARIOTIS, R ;
WEBB, MB ;
LAGALLY, MG .
PHYSICAL REVIEW LETTERS, 1989, 63 (21) :2393-2396
[6]  
MO YW, IN PRESS SURF SCI
[7]  
MOYAZAKI T, 1990, JPN J APPL PHYS, V29, pL1165
[8]  
SAKAMOTO T, 1989, P NATO ADV RES WORKS
[9]  
Santhosh Kumar M., UNPUB
[10]  
SRIVASTAVA D, UNPUB