UV INDUCED DIELECTRIC LOSS IN AIN CERAMICS

被引:5
作者
HARRIS, JH
ENCK, RC
机构
[1] Carborundum Company, BP America, Warrensville Research Center, Cleveland, Ohio 44124
关键词
D O I
10.1557/JMR.1993.2734
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dissipation factor of aluminum nitride ceramics (AIN), doped with various concentrations of oxygen, is probed at 1 kHz before and after exposure to UV radiation. The results of this study show that UV photogenerated carriers, which are trapped at charged oxygen impurity related defect sites, are responsible for the observed dielectric loss. A simple energy level diagram is presented that outlines trapped carrier distributions within the AlN bandgap and is consistent with the experimentally observed changes in dissipation factor as a function of time, UV exposure, and exposure to visible light, which liberates carriers from charged trap sites.
引用
收藏
页码:2734 / 2740
页数:7
相关论文
共 21 条
[1]  
ENCK RC, 1990, MATER RES SOC SYMP P, V167, P235
[2]  
ENCK RC, UNPUB
[3]   ON THE NATURE OF THE OXYGEN-RELATED DEFECT IN ALUMINUM NITRIDE [J].
HARRIS, JH ;
YOUNGMAN, RA ;
TELLER, RG .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (08) :1763-1773
[4]   LIGHT-INDUCED DEFECTS IN ALUMINUM NITRIDE CERAMICS [J].
HARRIS, JH ;
YOUNGMAN, RA .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (01) :154-162
[5]   PHOTOINDUCED THERMAL-CONDUCTIVITY CHANGES IN ALUMINUM NITRIDE [J].
HARRIS, JH ;
ENCK, RC ;
YOUNGMAN, RA .
PHYSICAL REVIEW B, 1993, 47 (09) :5428-5431
[6]  
HARRIS RD, 1990, MATER RES SOC SYMP P, V167, P229, DOI 10.2307/3601935
[7]  
HUSEBY IC, 1985, Patent No. 4547471
[8]  
KOMEYA K, 1981, YOGYO-KYOKAI-SHI, V89, P58
[9]  
KURAMOTO N, 1985, YOGYO-KYOKAI-SHI, V93, P41
[10]  
KURAMOTO N, 1989, ADV CERAM, V26, P107