CHARACTERIZATION OF A HYBRID PLASMA AND ITS APPLICATION TO A CHEMICAL SYNTHESIS

被引：105

作者：

YOSHIDA, T

TANI, T

NISHIMURA, H

AKASHI, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 02期

关键词：

D O I：

10.1063/1.332070

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：640 / 646

页数：7

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