SURVEY OF LOW-TEMPERATURE RF PLASMA POLYMERIZATION AND PROCESSING

被引：44

作者：

HAVENS, MR

BIOLSI, ME

MAYHAN, KG

机构：

[1] UNION CARBIDE CORP, CTR TECH, S CHARLESTON, WV 25303 USA

[2] UNIV MISSOURI, CTR MAT RES, ROLLA, MO 65401 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.569038

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：575 / 584

页数：10

共 89 条

[1] BADDOUR RF, 1967, APPLICATION PLASMAS
[2] BELL AT, 1971, CHEMICAL ENGINEE 112
[3] EFFECTS OF CORONA TREATMENT ON COMPOSITE FORMATION - ADHESION BETWEEN INCOMPATIBLE POLYMERS
BLAIS, P
CARLSSON, DJ
WILES, DM
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1971, 15 (01) : 129 - &
[4] BLAUSTEIN BD, 1969, CHEMICAL REACTIONS E
[5] ORGANIC POLYMER COATING DEPOSITED FROM A GAS DISCHARGE
BRADLEY, A
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1970, 9 (01): : 101 - &
[6] BRADLEY A, 1971, CHEM TECHNOL, P232
[7] ELECTRICAL PROPERTIES OF THIN ORGANIC FILMS
BRADLEY, A
HAMMES, JP
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (01) : 15 - 22
[8] BROWN KC, 1972, EUR POLYM J, V8, P129, DOI 10.1016/0014-3057(72)90089-4
[9] POLYMERIZATION IN RADIO-FREQUENCY GLOW DISCHARGES .1.
BROWN, KC
[J]. EUROPEAN POLYMER JOURNAL, 1972, 8 (01) : 117 - &
[10] PROPERTIES OF POLYMER THIN-FILMS ON SILICON
BUI, A
CARCHANO, H
SANCHEZ, D
[J]. THIN SOLID FILMS, 1972, 13 (01) : 207 - &