ELECTRON ENERGY-LOSS STUDY OF BONDING IN AMORPHOUS SILICON-CARBON ALLOY-FILMS PREPARED WITH HYDROGEN DILUTION

被引：8

作者：

MCKENZIE, DR

BRULEY, J

SMITH, GB

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,CAMBRIDGE CB3 0HE,ENGLAND

[2] NEW S WALES INST TECHNOL,DEPT PHYS,BROADWAY,NSW 2007,AUSTRALIA

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 23期

关键词：

D O I：

10.1063/1.100254

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2284 / 2286

页数：3

共 12 条

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[7] ELECTRON-DIFFRACTION STUDY OF CHEMICAL ORDERING IN GLOW-DISCHARGE A-SI1-XCX-H [J].

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[8] BONDING IN A-SI1-XCX - H FILMS STUDIED BY ELECTRON-ENERGY LOSS NEAR EDGE STRUCTURE [J].

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[9]

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[10] SI-L CORE EDGE FINE-STRUCTURE IN AN OXIDATION SERIES OF SILICON-COMPOUNDS - A COMPARISON OF MICROELECTRON ENERGY-LOSS SPECTRA WITH THEORY [J].

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LIN, SH .

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