COMPARISON OF ATOMIC FORCE MICROSCOPY AND NANOSCALE OPTICAL MICROSCOPY FOR MEASURING STEP HEIGHTS

被引：10

作者：

KOMATSU, H

MIYASHITA, S

机构：

[1] Institute for Materials Research, Tohoku University, Aoba-ku, Sendai, 980

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 3B期

关键词：

AFM; 2-BEAM INTERFEROMETRY; PHASE-CONTRAST MICROSCOPE; STEP HEIGHT; FRANK SPIRAL;

D O I：

10.1143/JJAP.32.1478

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Comparison of measured step heights was carried out by means of nanoscale optical microscopes and an atomic force microscope (AFM) using a Frank spiral as a standard reference. It was found that the individual step height of the spiral was about 16.5 nm as obtained using two-beam interferometry, but AFM showed the height as 23.45-18.98 nm. This discrepancy was discussed briefly.

引用

页码：1478 / 1479

页数：2