GROWTH-RATE, SURFACE-MORPHOLOGY, AND DEFECT MICROSTRUCTURES OF BETA-SIC FILMS CHEMICALLY VAPOR-DEPOSITED ON 6H-SIC SUBSTRATES

被引：80

作者：

KONG, HS

GLASS, JT

DAVIS, RF

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 01期

关键词：

D O I：

10.1557/JMR.1989.0204

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：204 / 214

页数：11

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