NEAR-SURFACE MODIFICATION OF ALPHA-AL2O3 BY ION-IMPLANTATION FOLLOWED BY THERMAL ANNEALING

被引：29

作者：

NARAMOTO, H ^{[1
]}

MCHARGUE, CJ ^{[1
]}

WHITE, CW ^{[1
]}

WILLIAMS, JM ^{[1
]}

HOLLAND, OW ^{[1
]}

ABRAHAM, MM ^{[1
]}

APPLETON, BR ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90934-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1159 / 1166

页数：8

共 15 条

[1] ATOMIC DISPLACEMENT AND IONIZATION EFFECTS ON OPTICAL-ABSORPTION AND STRUCTURAL-PROPERTIES OF ION-IMPLANTED AL2O3 [J].

ARNOLD, GW ;

KREFFT, GB ;

NORRIS, CB .

APPLIED PHYSICS LETTERS, 1974, 25 (10) :540-542

[2] CR2O3 SOLID SOLUTION HARDENING OF AL2O3 [J].

BRADT, RC .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1967, 50 (01) :54-&

[3]

CHERNOV F, 1976, ION IMPLANTATION SEM

[4]

EVANS BD, 1976, ION IMPLANTATION SEM, P265

[5]

GHATE BB, 1975, CERAM B, V54, P210

[6]

HIRVONEN JK, 1980, TREATISE MATERIALS S, V18

[7] EFFECT OF IONIZING-RADIATION ON DISPLACEMENT DAMAGE IN ION-BOMBARDED SINGLE-CRYSTAL ALPHA-AL203 AND ALPHA-SIO2 [J].

KREFFT, GB ;

BEEZHOLD, W ;

EERNISSE, EP .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, 22 (06) :2247-2249

[8]

LUERA TF, 1976, ION IMPLANTATION SEM

[9]

McHargue C. J., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P147

[10]

MCHARGUE CJ, 1981, P INT C SCI HARD MAT

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