MECHANISMS OF AL FILM GROWTH BY ULTRAVIOLET-LASER PHOTOLYSIS OF TRIMETHYLALUMINUM

被引：33

作者：

MOTOOKA, T ^{[1
]}

GORBATKIN, S ^{[1
]}

LUBBEN, D ^{[1
]}

ERES, D ^{[1
]}

GREENE, JE ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573644

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3146 / 3152

页数：7

共 19 条

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